JPH0238445Y2 - - Google Patents

Info

Publication number
JPH0238445Y2
JPH0238445Y2 JP2877685U JP2877685U JPH0238445Y2 JP H0238445 Y2 JPH0238445 Y2 JP H0238445Y2 JP 2877685 U JP2877685 U JP 2877685U JP 2877685 U JP2877685 U JP 2877685U JP H0238445 Y2 JPH0238445 Y2 JP H0238445Y2
Authority
JP
Japan
Prior art keywords
magazine
locking part
elevator
semiconductor manufacturing
material supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2877685U
Other languages
English (en)
Japanese (ja)
Other versions
JPS622246U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2877685U priority Critical patent/JPH0238445Y2/ja
Publication of JPS622246U publication Critical patent/JPS622246U/ja
Application granted granted Critical
Publication of JPH0238445Y2 publication Critical patent/JPH0238445Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Die Bonding (AREA)
JP2877685U 1985-02-28 1985-02-28 Expired JPH0238445Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2877685U JPH0238445Y2 (en]) 1985-02-28 1985-02-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2877685U JPH0238445Y2 (en]) 1985-02-28 1985-02-28

Publications (2)

Publication Number Publication Date
JPS622246U JPS622246U (en]) 1987-01-08
JPH0238445Y2 true JPH0238445Y2 (en]) 1990-10-17

Family

ID=30526973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2877685U Expired JPH0238445Y2 (en]) 1985-02-28 1985-02-28

Country Status (1)

Country Link
JP (1) JPH0238445Y2 (en])

Also Published As

Publication number Publication date
JPS622246U (en]) 1987-01-08

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